Item

Product

Purity

Specifications

Net Content

Cylinder

Valve

1

3N

Moisture：<10ppmw
Acidity as HCl：<1ppmw
Other Organics：<100ppmw

43.3 kg

DOT 43.3 L

CGA580

5N

Moisture：<5ppmv
Acidity as HCl：<0.1ppmw
Air：<1ppm
Other Fluorocarbons：<10ppmv

45 kg

DOT 43.3 L

CAG660

2

3N

Moisture：<40ppmw
Acidity as HCl：<1ppmw
Other Organics：<100ppmw

32.9 kg

DOT 43.3 L

CGA580

5N

Moisture：<5ppmv
Acidity as HCl：<0.1ppmw
Air：<4ppm

34 kg

DOT 43.3 L

CGA660

3

3N

Moisture：<40ppmw
Acidity as HCl：<1ppmw
Other Organics：<100ppmw

32.9 kg

DOT 43.3 L

CGA580

5N

Moisture：<5ppmv
Acidity as HCl：<0.1ppmw
Air：<4ppm

32.9 kg

DOT 43.3 L

CGA580

4

3N

Moisture：<40ppmw
Acidity as HCl：<1ppmw
Other Organics：<100ppmw

12.8 kg

DOT 43.3 L

CGA580

5N

Moisture：<5ppmv
Acidity as HCl：<0.1ppmw
Air：<4ppm

12.8 kg

DOT 43.3 L

CGA580

5

3N

Moisture：<40ppmw
Acidity as HCl：<1.0 ppmw
Other Organics：<100ppmw

45 kg

DOT 43.3 L

CGA580

6

5N

N2:<1.0 ppmv
O2:<1.0 ppmv
CH4:<0.5 ppmv
CO:<0.5 ppmv
CO2:<0.5 ppmv
Moisture:<1.0 ppmv
Si2H6:<1.0 ppmv
Resistivity:>10,000 (ohm/cm)

10kg/15kg

DOT 43.3/49 L

CGA350
DISS632

7

5N

N2:<2.0 ppmv
O2:<2.0 ppmv
CH4:<0.1 ppmv
CO:<0.1 ppmv
CO2:<2.0 ppmv
H2O:<2.0 ppmv
NH3:<0.5 ppmv
NO,NO2:<0.5 ppmv

27.2 kg

DOT 43.3 L

CGA326
DISS712

8

3N

Moisture：<10ppmw
Acidity as HCl：<1.0 ppmw
Other Organics：<100ppmw

44 kg

DOT 43.3 L

CGA580

5N

N2:<8.0 ppmv
O2:<2.0 ppmv
CH4:<1.0 ppmv
CO:<1.0 ppmv
CO2:<1.0 ppmv
H2O:<1.0 ppmv
Acidity as HF：<0.1 ppmw

44 kg

DOT 43.3 L

CGA660

9

5N

N2:<7.0 ppmv
Ar+O2:<2.0 ppmv
SF6:<1.0 ppmv
CO:<1.0 ppmv
CO2:<1.0 ppmv
H2O:<1.0 ppmv
Acidity as HF：<0.1 ppmw
Other Halocarbones:<1.0 ppmv

28.1 kg

DOT 43.3 L

CGA580